electron-beam evaporation source

electron-beam evaporation source
електронно-променевий випарник

English-Ukrainian dictionary of microelectronics. 2013.

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  • Electron beam physical vapor deposition — or EBPVD is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous… …   Wikipedia

  • Electron beam physical vapor deposition — Traduction à relire Electron beam physical vapor deposition → …   Wikipédia en Français

  • Evaporation (deposition) — Evaporation machine used for metallization at LAAS technological facility in Toulouse, France. Evaporation is a common method of thin film deposition. The source material is evaporated in a vacuum. The vacuum allows vapor particles to travel… …   Wikipedia

  • Électron — Traduction à relire Electron → …   Wikipédia en Français

  • Electron — For other uses, see Electron (disambiguation). Electron Experiments with a Crookes tube first demonstrated the particle nature of electrons. In this illustration, the profile of the cross shaped target is projected against the tube face at right… …   Wikipedia

  • Electron microscope — Diagram of a transmission electron microscope A 197 …   Wikipedia

  • Thin film — A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. Electronic semiconductor devices and optical coatings are the main applications benefiting from thin film construction. A… …   Wikipedia

  • Thin-film deposition — is any technique for depositing a thin film of material onto a substrate or onto previously deposited layers. Thin is a relative term, but most deposition techniques allow layer thickness to be controlled within a few tens of nanometers, and some …   Wikipedia

  • SMILETRAP — is a Penning trap mass spectrometer located in Stockholm, Sweden. The name is an acronym, which stands for Stockholm Mainz Ion LEvitation TRAP.The facility includes a Penning trap mass spectrometer consisting of a hyperbolic precision Penning… …   Wikipedia

  • vacuum technology — Introduction       all processes and physical measurements carried out under conditions of below normal atmospheric pressure. A process or physical measurement is generally performed in a vacuum for one of the following reasons: (1) to remove the …   Universalium

  • Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… …   Wikipedia


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